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技術名稱 Technology
發明人 Inventor
朱瑾, 黃柏仁, Markos, Mehretie, Yenesew,
所有權人 Asignee 國立臺灣科技大學

專利國家 Country 申請號 Application No. 專利號 Patent No. 中心案號 Serial No.
中華民國 108102450 I669498 1070029TW0
美國 16/353,275 申請中 1070029US0
  點閱數:447

技術摘要:
This article outlines a novel material to enable the detection of hydrogen gas, combining thin-film metallic glass (TFMG), ultrananocrystalline diamond (UNCD), and ZnO nanorods (ZNRs) used as a device for effective hydrogen gas sensing has been proposed. Three sensors were respectively fabricated using structures of pure ZNRs (Z), ZNR/UNCD (DZ), and ZNR/UNCD/TFMG (MDZ). The MDZ device exhibited performance superior to the other configurations, with a sensing response of 34% under very low hydrogen gas concentrations (10 ppm) at room temperature. The MDZ sensor proved very fast in terms of response time (20 s) and recovery time (35 s). In terms of selectivity, the sensors were particularly suited to hydrogen gas. The sensor achieved the same response performance even after two months, thereby demonstrating the stability of the hybrid nanostructures. We postulate that the superior performance of MDZ can be attributed to defect-related adsorption as well as charge carrier density. This paper also discusses the respective energy band model of the heterostructures. Our results indicate that the proposed hybrid ZNR/UNCD/TFMG nanostructures could be utilized in high-performance hydrogen gas sensors.

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