專利商品網


    快速搜尋        


zoomin      

技術名稱 Technology
發明人 Inventor
鄭正元, 林孟駿, Hossein,
所有權人 Asignee 國立臺灣科技大學

專利國家 Country 申請號 Application No. 專利號 Patent No. 中心案號 Serial No.
中華民國 104122477 I615602 1030104TW0
美國 14/755,743 US9581434B2 1030104US0
  點閱數:947

技術摘要:
Theoretically, when a plane light or collimated light is radiated to a fine grating part, the reflected light make an images of diffraction grating is repeated at regular distance. This image is called self-image or Talbot image. This apparatus used this phenomenon to measure the quality of linear scale. The Talbot image of linear scale is observed by a CMOS camera and a 10X objective lens. When the scale was moving by a motorized stage under OM, the effect of Talbot image will moved also. The changes of pixel’s intensity will be sinusoidal. The quality of linear scale will be verified by uniformity and matching of these two curves.

相關圖片: